APA (7th ed.) Citation

Xu, S., Taoka, Y., & Saito, S. Enhanced attractive force via torsion spring as rotatable tip structure in beam-structure electrostatic chucks. Elsevier.

Chicago Style (17th ed.) Citation

Xu, Sanchuan, Yuki Taoka, and Shigeki Saito. Enhanced Attractive Force via Torsion Spring as Rotatable Tip Structure in Beam-structure Electrostatic Chucks. Elsevier.

MLA (9th ed.) Citation

Xu, Sanchuan, et al. Enhanced Attractive Force via Torsion Spring as Rotatable Tip Structure in Beam-structure Electrostatic Chucks. Elsevier.

Warning: These citations may not always be 100% accurate.