Investigation of the Measurement Systems’ Suitability for the Non-Destructive Measurement of Complex Polymer-Based Micro and Nanostructures
In the fabrication of optical polymer-based components, such as diffractive gratings and waveguides, high throughput and high precision are required. The non-destructive evaluation of these complex polymer-based structures is a significant challenge. Different measurement techniques can measure the...
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-11-01
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| Series: | Metrology |
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| Online Access: | https://www.mdpi.com/2673-8244/4/4/40 |
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| author | Selina Burkert Lukas Schwörer Tim Schubert Jana Grundmann David Stein Andreas Heinrich |
| author_facet | Selina Burkert Lukas Schwörer Tim Schubert Jana Grundmann David Stein Andreas Heinrich |
| author_sort | Selina Burkert |
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| description | In the fabrication of optical polymer-based components, such as diffractive gratings and waveguides, high throughput and high precision are required. The non-destructive evaluation of these complex polymer-based structures is a significant challenge. Different measurement techniques can measure the structure geometry directly or via its functionality indirectly. This study investigates various measurement techniques aimed at assessing these structures from 200 nm up to 20 µm. Environmental scanning electron microscopy (ESEM), white light interferometry (WLI), atomic force microscopy (AFM), micro computed tomography (µCT), optical coherence tomography (OCT), phase contrast microscopy (PCM), and Mueller matrix ellipsometry (MME) are investigated for their practical limits of lateral resolution and aspect ratio. The impact of the specimens’ complexity factors, including structure width and aspect ratio, on measurement quality is discussed. A particular focus of this study is on the suitability of different measurement systems for evaluating undercuts and enclosed structures while considering structure size, slant angle, and cover thickness. The aim is to discuss the specific advantages of the individual measurement systems and their application areas in order to be able to quickly select suitable measurement systems for a non-destructive evaluation of polymer-based micro and nanostructures. |
| format | Article |
| id | doaj-art-11cb166e9bbc4b90a418e2676c8df48b |
| institution | Kabale University |
| issn | 2673-8244 |
| language | English |
| publishDate | 2024-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Metrology |
| spelling | doaj-art-11cb166e9bbc4b90a418e2676c8df48b2024-12-27T14:40:17ZengMDPI AGMetrology2673-82442024-11-014467369410.3390/metrology4040040Investigation of the Measurement Systems’ Suitability for the Non-Destructive Measurement of Complex Polymer-Based Micro and NanostructuresSelina Burkert0Lukas Schwörer1Tim Schubert2Jana Grundmann3David Stein4Andreas Heinrich5Aalen School of Applied Photonics, Aalen University of Applied Science, 73430 Aalen, GermanyAalen School of Applied Photonics, Aalen University of Applied Science, 73430 Aalen, GermanyInstitute for Materials Research, Aalen University of Applied Science, 73430 Aalen, GermanyPhysikalisch-Technische Bundesanstalt, 38116 Braunschweig, GermanyInstitute of Physics, University of Augsburg, 86150 Augsburg, GermanyAalen School of Applied Photonics, Aalen University of Applied Science, 73430 Aalen, GermanyIn the fabrication of optical polymer-based components, such as diffractive gratings and waveguides, high throughput and high precision are required. The non-destructive evaluation of these complex polymer-based structures is a significant challenge. Different measurement techniques can measure the structure geometry directly or via its functionality indirectly. This study investigates various measurement techniques aimed at assessing these structures from 200 nm up to 20 µm. Environmental scanning electron microscopy (ESEM), white light interferometry (WLI), atomic force microscopy (AFM), micro computed tomography (µCT), optical coherence tomography (OCT), phase contrast microscopy (PCM), and Mueller matrix ellipsometry (MME) are investigated for their practical limits of lateral resolution and aspect ratio. The impact of the specimens’ complexity factors, including structure width and aspect ratio, on measurement quality is discussed. A particular focus of this study is on the suitability of different measurement systems for evaluating undercuts and enclosed structures while considering structure size, slant angle, and cover thickness. The aim is to discuss the specific advantages of the individual measurement systems and their application areas in order to be able to quickly select suitable measurement systems for a non-destructive evaluation of polymer-based micro and nanostructures.https://www.mdpi.com/2673-8244/4/4/40measurement analysisscanning electron microscopywhite light interferometryatomic force microscopymicro computed tomographyoptical coherence tomography |
| spellingShingle | Selina Burkert Lukas Schwörer Tim Schubert Jana Grundmann David Stein Andreas Heinrich Investigation of the Measurement Systems’ Suitability for the Non-Destructive Measurement of Complex Polymer-Based Micro and Nanostructures Metrology measurement analysis scanning electron microscopy white light interferometry atomic force microscopy micro computed tomography optical coherence tomography |
| title | Investigation of the Measurement Systems’ Suitability for the Non-Destructive Measurement of Complex Polymer-Based Micro and Nanostructures |
| title_full | Investigation of the Measurement Systems’ Suitability for the Non-Destructive Measurement of Complex Polymer-Based Micro and Nanostructures |
| title_fullStr | Investigation of the Measurement Systems’ Suitability for the Non-Destructive Measurement of Complex Polymer-Based Micro and Nanostructures |
| title_full_unstemmed | Investigation of the Measurement Systems’ Suitability for the Non-Destructive Measurement of Complex Polymer-Based Micro and Nanostructures |
| title_short | Investigation of the Measurement Systems’ Suitability for the Non-Destructive Measurement of Complex Polymer-Based Micro and Nanostructures |
| title_sort | investigation of the measurement systems suitability for the non destructive measurement of complex polymer based micro and nanostructures |
| topic | measurement analysis scanning electron microscopy white light interferometry atomic force microscopy micro computed tomography optical coherence tomography |
| url | https://www.mdpi.com/2673-8244/4/4/40 |
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