A microgripper based on electrothermal Al–SiO2 bimorphs

A microgripper based on electrothermal Al–SiO2 bimorphs

Abstract Microgrippers are essential for assembly and manipulation at the micro- and nano-scales, facilitating important applications in microelectronics, MEMS, and biomedical engineering. To guarantee the safe handling of delicate materials and micro-objects, a microgripper needs to be designed to...

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Bibliographic Details
Main Authors: Hengzhang Yang, Yao Lu, Yingtao Ding, Ziyue Zhang, Anrun Ren, Haopu Wang, Xiaoyi Wang, Jiafang Li, Shuailong Zhang, Huikai Xie
Format: Article
Language:English
Published: Nature Publishing Group 2024-12-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-024-00821-2
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