Nitrogen Monoxide Detection with Pentacene-Based Film Bulk Acoustic Resonators
Exposure to hazardous gases like NOx can have a negative effect on our health. High-performance sensors that are also able to sustain harsh environments are needed to control high levels of these contaminants, which in most cases, are generated by automotive exhaust or industrial factories. In this...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-07-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/97/1/226 |
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| Summary: | Exposure to hazardous gases like NOx can have a negative effect on our health. High-performance sensors that are also able to sustain harsh environments are needed to control high levels of these contaminants, which in most cases, are generated by automotive exhaust or industrial factories. In this work, we prove NO detection in the ppm level, employing an AlN-based FBAR with pentacene as the active layer. FBARs are potential candidates as they have also proven operation and stability in harsh environments as well as temperature and humidity discrimination with a single sensor. |
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| ISSN: | 2504-3900 |