The Woofer-Type Piezo-Actuated Microspeaker Based on Aerosol Deposition and Metal MEMS Process

The Woofer-Type Piezo-Actuated Microspeaker Based on Aerosol Deposition and Metal MEMS Process

In this study, we present two configurations of piezo-actuated microspeakers, which were fabricated by combining a self-developed aerosol deposition method with the metal MEMS microfabrication process. The stainless steel used was structurally designed to enhance the displacement amplitude of the sp...

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Bibliographic Details
Main Authors: Wei-Ting Shih, Wan-Hsin Tsou, Dejan Vasic, François Costa, Wen-Jong Wu
Format: Article
Language:English
Published: MDPI AG 2025-03-01
Series:Micromachines
Subjects:
piezoeletric
MEMS speaker
piezo stacking
bimorph
packaging
Online Access:https://www.mdpi.com/2072-666X/16/3/353
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