The Woofer-Type Piezo-Actuated Microspeaker Based on Aerosol Deposition and Metal MEMS Process
In this study, we present two configurations of piezo-actuated microspeakers, which were fabricated by combining a self-developed aerosol deposition method with the metal MEMS microfabrication process. The stainless steel used was structurally designed to enhance the displacement amplitude of the sp...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-03-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/3/353 |
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