Mechanical and Tribological Properties of (AlCrNbSiTiMo)N High-Entropy Alloy Films Prepared Using Single Multiple-Element Powder Hot-Pressed Sintered Target and Their Practical Application in Nickel-Based Alloy Milling

(AlCrNbSiTiMo)N high-entropy alloy films with different nitrogen contents were deposited on tungsten carbide substrates using a radio-frequency magnetron sputtering system. Two different types of targets were used in the sputtering process: a hot-pressing sintered AlCrNbSiTi target fabricated using...

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Bibliographic Details
Main Authors: Jeng-Haur Horng, Wen-Hsien Kao, Wei-Chen Lin, Ren-Hao Chang
Format: Article
Language:English
Published: MDPI AG 2024-11-01
Series:Lubricants
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Online Access:https://www.mdpi.com/2075-4442/12/11/391
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Summary:(AlCrNbSiTiMo)N high-entropy alloy films with different nitrogen contents were deposited on tungsten carbide substrates using a radio-frequency magnetron sputtering system. Two different types of targets were used in the sputtering process: a hot-pressing sintered AlCrNbSiTi target fabricated using a single powder containing multiple elements and a vacuum arc melting Mo target. The deposited films were denoted as R<sub>N0</sub>, R<sub>N33</sub>, R<sub>N43</sub>, R<sub>N50</sub>, and R<sub>N56</sub>, where R<sub>N</sub> indicates the nitrogen flow ratio relative to the total nitrogen and argon flow rate (R<sub>N</sub> = (N<sub>2</sub>/(N<sub>2</sub> + Ar)) × 100%). The as-sputtered films were vacuum annealed, with the resulting films denoted as HR<sub>N0</sub>, HR<sub>N33</sub>, HR<sub>N43</sub>, HR<sub>N50</sub>, and HR<sub>N56</sub>, respectively. The effects of the nitrogen content on the composition, microstructure, mechanical properties, and tribological properties of the films, in both as-sputtered and annealed states, underwent thorough analysis. The R<sub>N0</sub> and R<sub>N33</sub> films displayed non-crystalline structures. However, with an increase in nitrogen content, the R<sub>N43</sub>, R<sub>N50</sub>, and R<sub>N56</sub> films transitioned to FCC structures. Among the as-deposited films, the R<sub>N43</sub> film exhibited the best mechanical and tribological properties. All of the annealed films, except for the HR<sub>N0</sub> film, displayed an FCC structure. In addition, they all formed an MoO<sub>3</sub> solid lubricating phase, which reduced the coefficient of friction and improved the anti-wear performance. The heat treatment HR<sub>N43</sub> film displayed the supreme hardness, H/E ratio, and adhesion strength. It also demonstrated excellent thermal stability and the best wear resistance. As a result, in milling tests on Inconel 718, the R<sub>N43</sub>-coated tool demonstrated a significantly lower flank wear and notch wear, indicating an improved machining performance and extended tool life. Thus, the application of the R<sub>N43</sub> film in aerospace manufacturing can effectively reduce the tool replacement cost.
ISSN:2075-4442