Control of a quasi-static MEMS Mirror for raster scanning projection applications
The angular motion of quasi-static micromirrors used for raster scanning projection applications is typically affected by undesired oscillations related to high-frequency resonant modes triggered by the sawtooth-like driving signal. This paper proposes a novel closed-loop tracking controller for imp...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2024-12-01
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| Series: | International Journal of Optomechatronics |
| Subjects: | |
| Online Access: | https://www.tandfonline.com/doi/10.1080/15599612.2024.2386991 |
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| Summary: | The angular motion of quasi-static micromirrors used for raster scanning projection applications is typically affected by undesired oscillations related to high-frequency resonant modes triggered by the sawtooth-like driving signal. This paper proposes a novel closed-loop tracking controller for improving the linearity of the trace motion, and hence the image brightness. It includes a feedforward action to achieve the required tracking performance under nominal conditions, and a feedback control for robustness against disturbances and other nonidealities. Notch filtering prevents resonance-induced ringing. The simplicity of the architecture enables an easy implementation on FPGA or ASIC. Experimental tests carried out on two different micromirrors with Lead-Zirconate-Titanate (PZT) piezoelectric actuation and piezoresistive sensing demonstrate an average linearity of [Formula: see text] and reproducibility of [Formula: see text] for sawtooth reference trajectories with up to [Formula: see text] amplitude and 120 Hz frequency, thus meeting the performance requirements mandated by the standards for high-resolutions projection applications. |
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| ISSN: | 1559-9612 1559-9620 |