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    Design and Fabrication of Silicon Pressure Sensors Based on Wet Etching Technology

    Design and Fabrication of Silicon Pressure Sensors Based on Wet Etching Technology by Fengchao Li, Shijin Yan, Cheng Lei, Dandan Wang, Xi Wei, Jiangang Yu, Yongwei Li, Pengfei Ji, Qiulin Tan, Ting Liang

    Published 2025-04-01
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