High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate by Fan Xia, Yande Peng, Wei Yue, Mingze Luo, Megan Teng, Chun-Ming Chen, Sedat Pala, Xiaoyang Yu, Yuanzheng Ma, Megha Acharya, Ryuichi Arakawa, Lane W. Martin, Liwei Lin

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