Phase Transformations Driving Biaxial Stress Reduction During Wake‐Up of Ferroelectric Hafnium Zirconium Oxide Thin Films by Samantha T. Jaszewski, Shelby S. Fields, Sebastian Calderon, Benjamin L. Aronson, Thomas E. Beechem, Kyle P. Kelley, Casey Zhang, Megan K. Lenox, Ian A. Brummel, Elizabeth C. Dickey, Jon F. Ihlefeld

Get full text