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    Surface chemistry of c-BN epitaxial growth on diamond substrates using fluorine-assisted ECR PECVD

    Surface chemistry of c-BN epitaxial growth on diamond substrates using fluorine-assisted ECR PECVD by Avani Patel, Saurabh Vishwakarma, David J. Smith, Robert J. Nemanich

    Published 2025-06-01
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