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    Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties

    Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties by Stefan Flege, Ruriko Hatada, Andreas Hanauer, Wolfgang Ensinger, Takao Morimura, Koumei Baba

    Published 2017-01-01
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