Showing 1 - 2 results of 2 for search 'Qingxin Wu', query time: 0.01s Refine Results
  1. 1
    Regional proximity effect correction for replicating 28 nm lines/spaces in HSQ as dielectric diffraction gratings with high aspect ratio

    Regional proximity effect correction for replicating 28 nm lines/spaces in HSQ as dielectric diffraction gratings with high aspect ratio by Qingxin Wu, Wentao Yuan, Qiucheng Chen, Hao Quan, Yifang Chen

    Published 2025-03-01
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  2. 2
    Transmitted electron exposure in electron beam lithography for double-side patterning of bi-layer metasurfaces on a SiNx membrane

    Transmitted electron exposure in electron beam lithography for double-side patterning of bi-layer metasurfaces on a SiNx membrane by Jinyu Guo, Yifei Wang, Hao Quan, Shuoqiu Tian, Qiucheng Chen, Wentao Yuan, Qingxin Wu, Kangping Liu, Yifang Chen, Qiong He, Lei Zhou

    Published 2025-09-01
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