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    Tailoring Nickel Oxide Thin Films: Comparative Study of Oxidizing Agents in Thermal and Plasma-Enhanced Atomic Layer Deposition

    Tailoring Nickel Oxide Thin Films: Comparative Study of Oxidizing Agents in Thermal and Plasma-Enhanced Atomic Layer Deposition by Mario Alberto Hidrogo-Rico, Nicola Nedev, Paul Horley, María Isabel Mendívil, Jhonathan Castillo-Saenz, Edgar Martínez-Guerra, Emilio J. Juarez-Perez, Francisco Servando Aguirre-Tostado, Arturo Susarrey-Arce, Eduardo Martínez-Guerra

    Published 2024-12-01
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