Enhanced superconducting qubit performance through ammonium fluoride etch by Cameron J Kopas, Dominic P Goronzy, Thang Pham, Carlos G Torres Castanedo, Matthew Cheng, Rory Cochrane, Patrick Nast, Ella Lachman, Nikolay Z Zhelev, André Vallières, Akshay A Murthy, Jin-su Oh, Lin Zhou, Matthew J Kramer, Hilal Cansizoglu, Michael J Bedzyk, Vinayak P Dravid, Alexander Romanenko, Anna Grassellino, Josh Y Mutus, Mark C Hersam, Kameshwar Yadavalli

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