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    Defect Studies in Thin-Film SiO<sub>2</sub> of a Metal-Oxide-Silicon Capacitor Using Drift-Assisted Positron Annihilation Lifetime Spectroscopy

    Defect Studies in Thin-Film SiO<sub>2</sub> of a Metal-Oxide-Silicon Capacitor Using Drift-Assisted Positron Annihilation Lifetime Spectroscopy by Ricardo Helm, Werner Egger, Catherine Corbel, Peter Sperr, Maik Butterling, Andreas Wagner, Maciej Oskar Liedke, Johannes Mitteneder, Michael Mayerhofer, Kangho Lee, Georg S. Duesberg, Günther Dollinger, Marcel Dickmann

    Published 2025-07-01
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