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    High-Frequency Grating-Based Microelectromechanical Systems Actuator

    High-Frequency Grating-Based Microelectromechanical Systems Actuator by Inês Pires, Inês S. Garcia, João Vieira, Zeev Zalevsky, Carlos Calaza, Filipe S. Alves, Rosana A. Dias

    Published 2024-04-01
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