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Biaxial Piezoelectrically Driven MEMS Mirror with Large Design Flexibility by Lena Wysocki, Patrick Schütt, Jörg Albers, Gunnar Wille, Erdem Yarar, Paul Raschdorf, Lianzhi Wen, Shanshan Gu-Stoppel
Published 2024-04-01Get full text
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