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Piezoelectric Layer Transfer Process for MEMS by Gwenael Le Rhun, Franklin Pavageau, Timothée Rotrou, Christel Dieppedale, Laurent Mollard
Published 2024-03-01Get full text
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Thermal Behavior of Biaxial Piezoelectric MEMS Scanner by Laurent Mollard, Christel Dieppedale, Antoine Hamelin, François Gardien, Gwenael Le Rhun, Jean Hue, Laurent Frey, Gael Castellan
Published 2024-06-01Get full text
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