Analysis of Metallic-to-Oxide Sputtering Mode Transition During Reactive Magnetron Deposition of Aluminum Oxide Coatings by Andrey V. Kaziev, Alexander V. Tumarkin, Dobrynya V. Kolodko, Maksim M. Kharkov, Raghavendra Konaguru, Dmitry G. Ageychenkov, Nikolay N. Samotaev, Konstantin Yu. Oblov

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