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Crack propagation in micro-chevron-test samples of direct bonded silicon-silicon wafers by K. Vogel, D. Wuensch, A. Shaporin, J. Mehner, D. Billep, M. Wiemer
Published 2013-04-01Get full text
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Crack propagation in micro-chevron-test samples of direct bonded silicon-silicon wafers by K. Vogel, D. Wuensch, A. Shaporin, J. Mehner, D. Billep, M. Wiemer
Published 2013-04-01Get full text
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