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    Characterization of ion track-etched conical nanopores in thermal and PECVD SiO2 using small angle X-ray scattering

    Characterization of ion track-etched conical nanopores in thermal and PECVD SiO2 using small angle X-ray scattering by Shankar Dutt, Rudradeep Chakraborty, Christian Notthoff, Pablo Mota-Santiago, Christina Trautmann, Patrick Kluth

    Published 2025-06-01
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