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    Formation of targets and investigation of Mn4Si7 coatings produced by magnetron sputtering

    Formation of targets and investigation of Mn4Si7 coatings produced by magnetron sputtering by Б.Д. Игамов, Г.Т. Иманова, А.И. Камардин, И.Р. Бекпулатов

    Published 2023-09-01
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